JPH0575826B2 - - Google Patents
Info
- Publication number
- JPH0575826B2 JPH0575826B2 JP62308980A JP30898087A JPH0575826B2 JP H0575826 B2 JPH0575826 B2 JP H0575826B2 JP 62308980 A JP62308980 A JP 62308980A JP 30898087 A JP30898087 A JP 30898087A JP H0575826 B2 JPH0575826 B2 JP H0575826B2
- Authority
- JP
- Japan
- Prior art keywords
- electron
- thin film
- magnetic field
- evaporated
- filament
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30898087A JPH01149955A (ja) | 1987-12-07 | 1987-12-07 | 薄膜製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30898087A JPH01149955A (ja) | 1987-12-07 | 1987-12-07 | 薄膜製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01149955A JPH01149955A (ja) | 1989-06-13 |
| JPH0575826B2 true JPH0575826B2 (en]) | 1993-10-21 |
Family
ID=17987515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30898087A Granted JPH01149955A (ja) | 1987-12-07 | 1987-12-07 | 薄膜製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01149955A (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0762240B2 (ja) * | 1989-08-02 | 1995-07-05 | 日電アネルバ株式会社 | 電子ビーム蒸着用電子銃 |
| JP4777947B2 (ja) * | 2007-08-06 | 2011-09-21 | 株式会社ワイ・ジー・ケー | 仕掛け用ハリスとこれを用いた釣り用仕掛け |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60181366U (ja) * | 1984-05-09 | 1985-12-02 | 日本電子株式会社 | 複数の電子ビ−ムにより材料を加熱する装置 |
-
1987
- 1987-12-07 JP JP30898087A patent/JPH01149955A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01149955A (ja) | 1989-06-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081021 Year of fee payment: 15 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081021 Year of fee payment: 15 |